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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Kolosov, Oleg Victor
Lancaster University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (29/29 displayed)
- 2023Determination of electric and thermoelectric properties of molecular junctions by AFM in peak force tapping modecitations
- 2022Low Thermal Conductivity in Franckeite Heterostructurescitations
- 2022Thermoelectric properties of organic thin films enhanced by π-π stackingcitations
- 2021Thermoelectric voltage modulation via backgate doping in graphene nanoconstrictions studied with STGM
- 2021SCANNING THERMAL MICROSCOPY OF 2D MATERIALS IN HIGH VACUUM ENVIRONMENT
- 2020Scale-Up of Room-Temperature Constructive Quantum Interference from Single Molecules to Self-Assembled Molecular-Electronic Filmscitations
- 2020Direct mapping of local Seebeck coefficient in 2D material nanostructures via scanning thermal gate microscopy
- 2019Visualisation of subsurface defects in van-der-Waals heterostructures via 3D SPM mapping
- 2018Geometrically Enhanced Thermoelectric Effects in Graphene Nanoconstrictionscitations
- 2018Mechanical Properties of Advanced Gas-Cooled Reactor Stainless Steel Cladding After Irradiationcitations
- 2017Structural and electrical characterization of SiO2 gate dielectrics deposited from solutions at moderate temperatures in aircitations
- 2017Structural and electrical characterization of SiO2 gate dielectrics deposited from solutions at moderate temperatures in air
- 2017Correlation of nano-scale electrical and topographical mapping of buried nanoscale semiconductor junctions
- 2017Imaging subsurface defects in WS2/WSe2 CVD flakes via Ultrasonic Force Microscopies
- 2017Subsurface imaging of stacking faults and dislocations in WS2 CVD grown flakes via Ultrasonic and Heterodyne Force Microscopy
- 2017Characterisation of local thermal properties in nanoscale structures by scanning thermal microscopy
- 2017Subsurface imaging of two-dimensional materials at the nanoscalecitations
- 2015Nanometre scale 3D nanomechanical imaging of semiconductor structures from few nm to sub-micrometre depthscitations
- 2014Graphitic platform for self-catalysed InAs nanowires growth by molecular beam epitaxycitations
- 2014Nanomechanical morphology of amorphous, transition, and crystalline domains in phase change memory thin filmscitations
- 2014Nanothermal characterization of amorphous and crystalline phases in chalcogenide thin films with scanning thermal microscopycitations
- 2014How Deep Ultrasonic and Heterodyne Force Microscopies Can Look at the Nanostructure of 2D Materials?
- 2013Atomic force acoustic microscopy
- 2005Application specific integrated circuitry for controlling analysis of a fluid
- 2005Multiparameteric oil condition sensor based on the tuning fork technology for automotive applicationscitations
- 2004Application specific integrated circuitry for controlling analysis of a fluid
- 2003Local probing of thermal properties at submicron depths with megahertz photothermal vibrations.citations
- 2002Nanometer-scale mechanical imaging of aluminum damascene interconnect structures in a low-dielectric-constant polymer.citations
- 2000Nanoscale elastic imaging of aluminum/low-k dielectric interconnect structures
Places of action
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article
Nanomechanical morphology of amorphous, transition, and crystalline domains in phase change memory thin films
Abstract
In the search for phase change materials (PCM) that may rival traditional random access memory, a complete understanding of the amorphous to crystalline phase transition is required. For the well-known Ge2Sb2Te5 (GST) and GeTe (GT) chalcogenides, which display nucleation and growth dominated crystallization kinetics, respectively, this work explores the nanomechanical morphology of amorphous and crystalline phases in 50 nm thin films. Subjecting these PCM specimens to a lateral thermal gradient spanning the crystallization temperature allows for a detailed morphological investigation. Surface and depth-dependent analyses of the resulting amorphous, transition and crystalline regions are achieved with shallow angle cross-sections, uniquely implemented with beam exit Ar ion polishing. To resolve the distinct phases, ultrasonic force microscopy (UFM) with simultaneous topography is implemented revealing a relative stiffness contrast between the amorphous and crystalline phases of 14% for the free film surface and 20% for the cross-sectioned surface. Nucleation is observed to occur preferentially at the PCM-substrate and free film interface for both GST and GT, while fine subsurface structures are found to be sputtering direction dependent. Combining surface and cross-section nanomechanical mapping in this manner allows 3D analysis of microstructure and defects with nanoscale lateral and depth resolution, applicable to a wide range of materials characterization studies where the detection of subtle variations in elastic modulus or stiffness are required.