| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Petit, Agnes
Groupe de Recherches sur l'Energétique des Milieux Ionisés
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (6/6 displayed)
- 2016High-resolution emission spectroscopy of random lasing in GaN films pumped by UV-pulsed lasercitations
- 2016High-resolution emission spectroscopy of random lasing in GaN films pumped by UV-pulsed laser ; Висока роздільна здатність емісійної спектроскопії випадкової генерації в GaN плівках з накачуванням УФ-імпульсного лазераcitations
- 2014About the key factors driving the resistivity of AuOx thin films grown by reactive magnetron sputteringcitations
- 2014Electrical and optical properties of Nb/Nd-codoped TiO2 thin films grown by pulsed-laser deposition
- 2012Phase separation in oxygen deficient gallium oxide films grown by pulsed-laser depositioncitations
- 2011Dynamics of zinc oxide plasma plume in picosecond pulsed-laser deposition
Places of action
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article
About the key factors driving the resistivity of AuOx thin films grown by reactive magnetron sputtering
Abstract
International audience ; Deposition of gold containing oxygen thin films was carried out at room temperature onto silicon substrates by reactive magnetron sputtering under Ar/O2 plasma. Nuclear reaction analysis of films shows that different oxygen concentrations (AuOx with x = 0 to 1.2) can be reached depending on the growth conditions. X-ray diffraction and scanning electron microscopy of the deposited samples evidence nanocrystallised films formed of pure Au phase or of Au metal mixed to a low ordered Au2O3 phase. The films display a columnar growth with grains in the 20-30 nm size range. A higher resistivity than that of pure gold is systematically measured by a four probe method. The electrical resistivity of the films was found to be correlated to the mean oxygen amount, and also to the microstructure of the Au phase.