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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Mähne, H.
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Publications (4/4 displayed)
- 2015Effect of the stoichiometry of niobium oxide on the resistive switching of Nb2O5 based metal-insulator-metal stackscitations
- 2014Analog resistive switching behavior of Al/Nb<inf>2</inf>O<inf>5</inf>/Al devicecitations
- 2012Filamentary resistive switching in amorphous and polycrystalline Nb <sub>2</sub>O <sub>5</sub> thin filmscitations
- 2012Thermally activated crystallization of Nb 2O 5 grown on Pt electrodecitations
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article
Thermally activated crystallization of Nb 2O 5 grown on Pt electrode
Abstract
<p>The influence of the local crystallographic orientation of the polycrystalline bottom platinum electrode on the crystallization of niobium pentoxide thin films during their rapid thermal annealing was investigated by X-ray diffraction, X-ray reflectivity and transmission electron microscopy. The Nb <sub>2</sub>O <sub>5</sub> thin films under study were reactively sputtered in a mixed O <sub>2</sub>/Ar atmosphere and subsequently subjected to the annealing in argon atmosphere at temperatures ranging from 500 °C to 700 °C. The X-ray diffraction confirmed a transition from the amorphous niobium oxide to the crystalline orthorhombic Nb <sub>2</sub>O <sub>5</sub> for temperatures between 500 °C and 600 °C. The X-ray reflectivity measurements showed that the crystallization process was accompanied by a continuous increase of the electron density in Nb <sub>2</sub>O <sub>5</sub> and by a rapid increase of the surface roughness at 700 °C. It was further observed by transmission electron microscopy that Nb <sub>2</sub>O <sub>5</sub> crystallizes selectively and that the crystalline domains of Nb <sub>2</sub>O <sub>5</sub> possess a strong orientation relationship to the platinum from the bottom electrode. The orientation relationship (111)Pt ||(160)Nb <sub>2</sub>O <sub>5</sub> was identified as the most beneficial one for crystallization of Nb <sub>2</sub>O <sub>5</sub>.</p>