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Utke, Ivo
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Topics
Publications (58/58 displayed)
- 2024Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al 2 O 3 films grown by thermal atomic layer depositioncitations
- 2024Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al<sub>2</sub>O<sub>3</sub> films grown by thermal atomic layer depositioncitations
- 2024Unraveling the highly plastic behavior of ALD‐aluminum oxide encapsulations by small‐scale tensile testingcitations
- 2024Unraveling interdiffusion phenomena and the role of nanoscale diffusion barriers in the copper-gold systemcitations
- 2024Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testingcitations
- 2023Roadmap for focused ion beam technologiescitations
- 2023Roadmap for focused ion beam technologiescitations
- 2022Mechanical properties of atomic-layer-deposited Al 2 O 3 /Y 2 O 3 nanolaminate films on aluminum toward protective coatingscitations
- 2022On the thinnest Al 2 O 3 interlayers in Al‐based nanolaminates to enhance strength, and the role of constraintcitations
- 2022Vacuum versus ambient pressure inert gas thermogravimetry: a study of silver carboxylatescitations
- 2022In situ time-of-flight mass spectrometry of ionic fragments induced by focused electron beam irradiation: investigation of electron driven surface chemistry inside an SEM under high vacuumcitations
- 2022Real-time in situ parallel detection of elements and molecules with TOFMS during ALD for chemical quality control of thin filmscitations
- 2021High sensitivity of fluorine gas-assisted FIB-TOF-SIMS for chemical characterization of buried sublayers in thin filmscitations
- 2021Solving the inverse Knudsen problem: gas diffusion in random fibrous mediacitations
- 2021Structure, morphology, heat capacity, and electrical transport properties of ti 3 (Al,si)c 2 materialscitations
- 2021Practical aspects of focused ion beam time-of-flight secondary ion mass spectrometry analysis enhanced by fluorine gas coinjectioncitations
- 2021Mechanics of nanoscale ϵ-Fe 2 O 3 /organic superlattices toward flexible thin-film magnetscitations
- 2020Metals by Micro‐Scale Additive Manufacturing: Comparison of Microstructure and Mechanical Propertiescitations
- 2020Thin-film engineering of mechanical fragmentation properties of atomic-layer-deposited metal oxidescitations
- 2020Interfacial adhesion of alumina thin films over the full compositional range of ternary fcc alloy films: a combinatorial nanoindentation studycitations
- 2020Annealed cobalt-carbon nanocomposites for room-temperature spintronic applicationscitations
- 2020Metals by micro-scale additive manufacturing: comparison of microstructure and mechanical propertiescitations
- 2020Synthesis of model Al-Al 2 O 3 multilayer systems with monolayer oxide thickness control by circumventing native oxidationcitations
- 2020Molecular layer deposited alucone thin films from long-chain organic precursors: from brittle to ductile mechanical characteristicscitations
- 2019Fracture Mechanics and Oxygen Gas Barrier Properties of Al2O3/ZnO Nanolaminates on PET Deposited by Atomic Layer Depositioncitations
- 2019Fracture mechanics and oxygen gas barrier properties of Al 2 O 3 /ZnO nanolaminates on PET deposited by atomic layer depositioncitations
- 2019A novel copper precursor for electron beam induced deposition
- 2018Comparative study of post-growth annealing of Cu(hfac) 2 , Co 2 (CO) 8 and Me 2 Au(acac) metal precursors deposited by FEBIDcitations
- 2018Magnetoelectrical transport improvements of postgrowth annealed iron–cobalt nanocomposites: a possible route for future room-temperature spintronicscitations
- 2018A novel copper precursor for electron beam induced depositioncitations
- 2018Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID
- 2017Boron nitride nanoporous membranes with high surface charge by atomic layer depositioncitations
- 2017Atomic layer deposition of titanium oxide on single-layer graphene: an atomic-scale study toward understanding nucleation and growthcitations
- 2017Reaction and growth mechanisms in Al 2 O 3 deposited via atomic layer deposition: elucidating the hydrogen sourcecitations
- 2017Boron Nitride Nanoporous Membranes with High Surface Charge by Atomic Layer Depositioncitations
- 2016High conformity and large domain monocrystalline anatase on multiwall carbon nanotube core–shell nanostructure: synthesis, structure, and interfacecitations
- 2016Role of NH3 in the Electron-Induced Reactions of Adsorbed and Solid Cisplatincitations
- 2016Role of NH 3 in the electron-induced reactions of adsorbed and solid cisplatincitations
- 2016Annealing-based electrical tuning of cobalt–carbon deposits grown by focused-electron-beam-induced depositioncitations
- 2016Surface passivation for reliable measurement of bulk electronic properties of heterojunction devicescitations
- 2014Growth and characterization of CNT–TiO 2 heterostructurescitations
- 2014Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposurecitations
- 2014Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubescitations
- 2014The nanoscale implications of a molecular gas beam during electron beam induced depositioncitations
- 2014Use of radiofrequency power to enable glow discharge optical emission spectroscopy ultrafast elemental mapping of combinatorial libraries with nonconductive components: nitrogen-based materialscitations
- 2013Single superparamagnetic bead detection and direct tracing of bead position using novel nanocomposite nano-hall sensorscitations
- 2012High spatial resolution time-of-flight secondary ion mass spectrometry for the masses: a novel orthogonal ToF FIB-SIMS instrument with in situ AFMcitations
- 2012Single paramagnetic bead detection and direct measurement of the spatial magnetic resolution using novel nanocomposite Hall sensors
- 2012Focused ion and electron beam induced deposition of magnetic nanostructures
- 2011In situ characterization of tensile-bending load bearing ability of multi-walled carbon nanotubes in alumina-based nanocompositescitations
- 2011Low-energy electron-induced decomposition and reactions of adsorbed tetrakis(trifluorophosphine)platinum [Pt(PF 3 ) 4 ]citations
- 2011Determination of the surface diffusion coefficient and the residence time of adsorbates via local focused electron beam induced chemical vapour depositioncitations
- 2010Improving the metallic content of focused electron beam-induced deposits by a scanning electron microscope integrated hydrogen-argon microplasma generatorcitations
- 2010Small, minimally invasive, direct: electrons induce local reactions of adsorbed functional molecules on the nanoscalecitations
- 2009In situ tensile testing of individual Co nanowires inside a scanning electron microscopecitations
- 2008Controlled focused electron beam-induced etching for the fabrication of sub-beam-size nanoholescitations
- 2006Local electron beam induced reduction and crystallization of amorphous titania filmscitations
- 2006Measurement of the bending strength of vapor-liquid-solid grown silicon nanowirescitations
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article
Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al<sub>2</sub>O<sub>3</sub> films grown by thermal atomic layer deposition
Abstract
<jats:p>Amorphous oxide thin films grown by thermal atomic layer deposition (ALD) typically contain high impurity concentrations of hydrogen, which affects both chemistry and structure and thereby the functional properties, such as the barrier properties in, for example, microelectronic and photovoltaic devices. This study discloses the effect of H incorporation in amorphous Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> ALD oxide films on the local chemical binding states of Al, O and H, as well as the oxide density and stoichiometry, by a combined analytical approach using elastic recoil detection analysis, Rutherford backscattering spectroscopy and full chemical state analysis by dual‐source X‐ray photoelectron spectroscopy (XPS)/hard X‐ray photoelectron spectroscopy (HAXPES). The experimental findings are compared with crystalline anhydrous α‐Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> and hydroxide α‐Al (OH)<jats:sub>3</jats:sub> reference phases and further supported by molecular dynamic simulations. It is shown that H preferably forms covalent –OH hydroxyl bonds with O in the nearest‐neighbour coordination spheres of interstitial Al cations, which affects both the ligand electronic polarizability and the bond length of the randomly interconnected [AlO<jats:sub>n</jats:sub>] polyhedral building blocks in the amorphous ALD oxide films.</jats:p>