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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ayouchi, R.
Laboratoire Analyse, Géométrie et Applications
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Topics
Publications (16/16 displayed)
- 2014Tungsten trioxide nanostructured electrodes for organic dye sensitised solar cellscitations
- 2013Optical properties of lead-free NKN films from transmission and spectral ellipsometrycitations
- 2012Complex dielectric function in lead-free NKN filmscitations
- 2012Transfer characteristic of zinc nitride based thin film transistorscitations
- 2012Development of lead-free materials for piezoelectric energy harvestingcitations
- 2012Secondary electron emission yield (SEY) in amorphous and graphitic carbon films prepared by PLDcitations
- 2010Local electromechanical properties of ZnO thin films and microcrystals
- 2010Optical properties of TiO(2) thin films prepared by chemical spray pyrolysis from aqueous solutionscitations
- 2010Local piezoelectric properties of ZnO thin films prepared by RF-plasma-assisted pulsed-laser deposition methodcitations
- 2010RF-plasma assisted PLD growth of Zn3N2 thin filmscitations
- 2009Morphological and optical properties of silicon thin films by PLDcitations
- 2008Study of trap states in zinc oxide (ZnO) thin films for electronic applicationscitations
- 2007ZnO films grown by laser ablation with and without oxygen CVDcitations
- 2007Photoinduced excess carrier dynamics in PLD-grown ZnOcitations
- 2001Electrochemical properties of lead oxide films obtained by spray pyrolysis as negative electrodes for lithium secondary batteriescitations
- 2000Compositional, structural and electrical characterization of barium titanate thin films prepared on fused silica and Si(111) by spray pyrolysis
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document
Optical properties of TiO(2) thin films prepared by chemical spray pyrolysis from aqueous solutions
Abstract
Titanium dioxide (TiO(2)) is known to have three different kinds of polymorphous crystalline forms: rutile, anatase, and brookite. The rutile phase is always formed at higher temperatures, while the anatase phase is formed at lower temperatures and transformed into rutile phase above 800 degrees C. Various deposition techniques have been developed for depositing TiO(2) thin films, including evaporation, sputtering, chemical vapour deposition and thermal oxidation of titanium. Among them, the Chemical Spray Pyrolysis (CSP) technique has many advantages, such as good conformal coverage, the possibility of epitaxial growth and the application to large area deposition. Also, this method is low cost and it is easy to control the deposition growth parameters. In the present work, TiO(2) thin films have been deposited on p-Si (001) and fused silica substrates by Chemical Spray Pyrolysis (CSP) method from aqueous solution containing titanium (IV) isopropoxide (Ti[OCH(CH(3))(2)](4). As-deposited thin films show anatase polycrystalline structure, and rutile phase formed for films annealed at 750 degrees C. SEM images have confirmed a smooth and crack-free surface with low surface roughness. X-ray photoelectron spectroscopy (XPS) combined with 4 keV Ar(+) depth profiling has shown that crystallized films correspond to TiO(2). Residual carbon coming from the organic precursor solution is only detected at the surface of the film. Thin films deposited on fused silica were highly transparent (more than 85 %), with an indirect optical band gap of 3,43 and 3,33 eV for as-deposited and annealed films, respectively, and refractive indexes in the range between 2.01-2.29. Spectroscopic Ellipsometry (SE) also has been used to extract optical parameters. SE data fitted to triple-layer physical model revealed the same tendency to increase refractive index in annealed films. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim