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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Rauch, Jean-Yves
Laboratoire Bourguignon des Matériaux et Procédés
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Titanium oxynitride thin films by the reactive sputtering process with an independent pulsing of O2 and N2 gases
- 2022Tunable Electrical Properties of Ti-B-N Thin Films Sputter-Deposited by the Reactive Gas Pulsing Process
- 2016Effect of oxygen vacancies on crystallization and piezoelectric performance of PZTcitations
- 2016Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layercitations
- 2016Temperature dependence of electrical resistivity in oxidized vanadium films grown by the GLAD techniquecitations
- 2013Acoustic resonator based on periodically poled lithium niobate ridgecitations
- 2013Metal-to-Dielectric transition induced by annealing of oriented titanium thin films
- 2013Metal-to-dielectric transition induced by annealing of oriented titanium thin filmscitations
- 2012Ammonia gas sensors based on polypyrrole films: Influence of electrodeposition parameterscitations
- 2010Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bondingcitations
- 2010One-pot electrosynthesis of polyglycine-like thin film on platinum electrodes as transducer for solid state pH measurementscitations
- 2010Electrochemically deposited polyethyleneimine films and their characterizationcitations
- 2009Physical and Mechanical Properties of CrAlN and CrSiN Ternary Systems for Wood Machining Applicationscitations
- 2009Preparation of flat gold terraces for protein chip developmentscitations
- 2007Development of miniaturized pH biosensors based on electrosynthesized polymer filmscitations
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article
Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer
Abstract
This paper presents a method to determine the mechanical properties of piezoelectric thin films. The vibrational behavior of microcantilevers and clamped–clamped beams actuated by aluminum nitride (AlN) piezoelectric films were analyzed in order to investigate the suitability of these devices as characterization tools. Different geometries of resonators composed of a free-standing structure made up of a TiPt/AlN/TiPt piezoelectric stack were tested. The out-of-plane motion of the resonators was assessed by laser Doppler vibrometry. An AlN Young’s modulus of about 200GPa was extracted from resonance-frequency measurements by means of Comsol software simulations that allow taking into account AlN underetching. This value of Young’s modulus was compared to the one measured by a nanoindentationtechnique. The quality of crystallinity was also assessed using X-ray diffraction (XRD) measurements. We then estimated the residual stress (about 200MPa) using an interferometry measurement.