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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Bertran, E.
Universitat de Barcelona
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (5/5 displayed)
- 2023Advancements in Plasma-Enhanced Chemical Vapor Deposition for Producing Vertical Graphene Nanowallscitations
- 2014Arc-Discharge Synthesis of Iron Encapsulated in Carbon Nanoparticles for Biomedical Applicationscitations
- 2006In-situ monitoring of laser annealing by micro-Raman spectroscopy for hydrogenated silicon nanoparticles produced in radio frequency glow dischargecitations
- 2002Calorimetry of hydrogen desorption from a-Si nanoparticlescitations
- 2001Enhancement of oxidation rate of a-Si nanoparticles during dehydrogenationcitations
Places of action
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article
In-situ monitoring of laser annealing by micro-Raman spectroscopy for hydrogenated silicon nanoparticles produced in radio frequency glow discharge
Abstract
<p>Low temperature Plasma Enhanced Chemical Vapour Deposition (PECVD) grown amorphous hydrogenated Si (a-Si: H) thin films form the basis of many photovoltaic and microelectronic devices such as solar cells and TFTs. Amorphous hydrogenated silicon in the form of nanoparticles has been produced by power modulation of the PECVD processes. The stability of these nanoparticles under high temperatures and high power illumination is therefore of interest and to this end we report on combined laser annealing and in-situ monitoring through the use of micro-raman spectroscopy. Interpretation of spectra is done with the help of complementary techniques including scanning (SEM) and transmission electron microscopy (TEM).</p>