| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Stafford, Luc
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2024Layer-by-layer structured nanocomposite deposits from plasma-synthesized organosilicon nanoparticles and organosilicon nanoparticles decorated with Ag nanoparticles by taking advantage of cyclic nanoparticle formation in Ar/HMDSO reactive plasmas
- 2024Layer-by-layer structured nanocomposite deposits from plasma-synthesized organosilicon nanoparticles and organosilicon nanoparticles decorated with Ag nanoparticles by taking advantage of cyclic nanoparticle formation in Ar/ HMDSO reactive plasmas
- 2022Fine-scale structure of nanocomposite films achieved by plasma synthesis of successive generations of nanoparticles
- 2022Kinetics driving nanocomposite thin-film deposition in low-pressure misty plasma processescitations
- 2020Modification of the optical properties and nano-crystallinity of anatase TiO2nanoparticles thin film using low pressure O2 plasma treatmentcitations
- 2019Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSOcitations
- 2019Time-resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSOcitations
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article
Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO
Abstract
<jats:title>Abstract</jats:title><jats:p>Plasma sampling mass spectrometry (PSMS) has been carried out to study the fragmentation kinetics of hexamethyldisiloxane (HMDSO) in a low‐pressure, axially asymmetric argon rf discharge designed for the growth of nanocomposite thin films through a hybrid PVD/PECVD method. Experiments have been conducted with a pulsed injection of HMDSO over a 5‐s period. Plasma conditions have been chosen to favor formation and disappearance of dust occurring in cycles of a few hundred seconds. The dissociation degree of HMDSO and the relative intensities of HMDSO‐related fragments are reported and analyzed regarding these two specific time‐scales. PSMS showed that formation of dust increases HMDSO dissociation. The same result can be deduced from the particle balance equation of HMDSO using the electron density and temperature obtained from optical emission spectroscopy as the only input parameters. For HMDSO, electron‐impact dissociation is the dominant loss pathway over diffusion and recombination on the reactor walls. Small C <jats:sub>x</jats:sub>H <jats:sub>y</jats:sub> compounds and H <jats:sub>2</jats:sub> are mostly generated from surface recombination mechanisms and lost by electron‐impact dissociation.</jats:p>