| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Supiot, Philippe
Université de Lille
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2024Degradation processes of brominated flame retardants dispersed in high impact polystyrene under UV–visible radiationcitations
- 2024Degradation of Decabromodiphenyl Ether Dispersed in Poly (Acrylo-Butadiene-Styrene) Using a Rotatory Laboratory Pilot Under UV-Visible Irradiationcitations
- 2023Degradation processes of brominated flame retardants dispersed in high impact polystyrene under UV–visible radiationcitations
- 2023Electron Beam Processing as a Promising Tool to Decontaminate Polymers Containing Brominated Flame Retardantscitations
- 2023Temperature and frequency dependence on dielectric permittivity and electrical conductivity of recycled Liquid Crystalscitations
- 2023Plasma-modified wood sawdust waste for the removal of reactive blue II anionic dye from aqueous solutioncitations
- 2022Enhanced thermal stability of biobased crosslinked poly (isobornylacrylate-co-2-ethylhexylacrylate) copolymerscitations
- 2022Enhanced thermal stability of biobased crosslinked poly (isobornylacrylate-co-2-ethylhexylacrylate) copolymerscitations
- 2021Effect of structure on the glass transition temperatures of linear and crosslinked poly(isobornylacrylate-co-isobutylacrylate)citations
- 2020Modification of hydroxyapatite surface properties by electron irradiationcitations
- 2018Analysis of dynamic mechanical properties of photochemically crosslinked poly(isobornylacrylate-co-isobutylacrylate) applying WLF and Havriliak-Negami modelscitations
- 2010Materials chemistry for catalysis : Coating of catalytic oxides on metallic foamscitations
- 2009Preparation and multi-characterization of plasma polymerized allylamine filmscitations
- 2008ppTMDS as a new polymer technology for a high throughput bio-MEMS designcitations
- 2008Preparation and characterization of thin organosilicon films deposited on SPR chipcitations
- 2006Growth and modification of organosilicon films in PECVD and remote afterglow reactorscitations
Places of action
| Organizations | Location | People |
|---|
article
Growth and modification of organosilicon films in PECVD and remote afterglow reactors
Abstract
Five hundred nanometer thick organosilicon coatings are prepared on Si substrates in parallel by the plasma-assisted polymerisation of hexamethyldisiloxane (HMDSO) in an RF-inductively coupled plasma (RFICP) and distributed electron cyclotron resonance plasma (DECRP) at low pressure (0.27 Pa) and of tetramethyldisiloxane (TMDSO) premixed with oxygen in an N2 microwave induced remote afterglow (MIRA) at 560 Pa. The structure of these different films is analyzed by different techniques, such as Fourier-transform infrared spectroscopy, Rutherford backscattering spectrometry, atomic force microscopy, ellipsometry, and contact angle measurements. Results of the film composition (at least 30% carbon content), optical properties, and morphology indicate a low cross-linking degree accompanied by short chain length for RFICP and DECRP films, in contrast to a high-molecular-weight structure observed for the MIRA film. Carbon removal is achieved within the same plasma reactors by further oxygencontaining plasma treatment performed in the RF-ICP (3.33 Pa), DECRP (0.27 Pa, ~200 V biased substrate), and MIRA (N2/O2 (98.7:1.3, 560 Pa)) reactors. The same measurements are carried out on the treated samples in order to detect the main changes in film composition, optical properties, and morphology. The evolution of surface energy is also studied. The results are discussed according to film structure and process specificity. O/Si and C/Si elemental ratios calculated from RBS analysis for an as-deposited RF-inductively coupled plasma coating (RFICP) and films post-treated by N2/O2 microwave induced remote afterglow (MIRA), O2 RFICP and O2 distributed electron cyclotron resonance plasma (DECRP, biased sample) processes.