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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Cian, Alessandro
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (9/9 displayed)
- 2024Enhancing the Deposition Rate and Uniformity in 3D Gold Microelectrode Arrays via Ultrasonic-Enhanced Template-Assisted Electrodeposition
- 2024Multi-cycle Chamber Conditioning for Plasma Etching of SiO2: From Optimization to Stability in Lot Processing
- 2023Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography
- 2023Imaging of Antiferroelectric Dark Modes in an Inverted Plasmonic Latticecitations
- 2023Imaging of Antiferroelectric Dark Modes in an Inverted Plasmonic Latticecitations
- 2023Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritronscitations
- 2022Photon management in SiO2-SnO2:Yb3+ hybrid 1D microcavitycitations
- 2022Humidity Responsive Reflection Grating Made by Ultrafast Nanoimprinting of a Hydrogel Thin Filmcitations
- 2020Fast optical humidity sensor based on nanostructured hydrogels
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article
Humidity Responsive Reflection Grating Made by Ultrafast Nanoimprinting of a Hydrogel Thin Film
Abstract
The response time of state of the art humidity sensors is approximately 8 s. A faster tracking of humidity change is especially required for health care devices. We focused our research on the direct nanostructuring of a humidity-sensitive polymer thin film and combined it with an optical read-out method. Our goal was to improve the response time by changing the surface-to-volume ratio of the thin film and to test a different measurement method compared to state of the art sensors. Large and homogeneous nanostructured areas were fabricated by nanoimprint lithography on poly(2-hydroxyethyl methacrylate) thin films. Those thin films were made by initiated chemical vapor deposition (iCVD). To the author's knowledge, this is the first time nanoimprint lithography was applied on iCVD polymer thin films. With the imprinting process we developed a diffraction grating in the visible wavelength regime. The optical and physicochemical behavior of the nanostructures was modeled with multi-physic simulations. After successful modeling and fabrication a first proof of concept showed that humidity dependency by using an optical detection of the first diffraction order peak is observable. The response time of the structured thin film resulted to be at least three times faster compared to commercialsensors. This article is protected by copyright. All rights reserved.