| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Schubert, Eva
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2024In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2018Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniquescitations
- 2016Anisotropy, band-to-band transitions, phonon modes, and oxidation properties of cobalt-oxide core-shell slanted columnar thin filmscitations
- 2015Structural and optical properties of cobalt slanted nanopillars conformally coated with few-layer graphenecitations
- 2015Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometrycitations
- 2012Nanomagnetic skyrmionscitations
- 2012Optical properties of cobalt slanted columnar thin films passivated by atomic layer depositioncitations
- 2012Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Filmscitations
- 2011Length scales of interactions in magnetic, dielectric, and mechanical nanocompositescitations
- 2007Sub‐Wavelength Antireflection Coatings From Nanostructure Sculptured Thin Filmscitations
- 2005Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrorscitations
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article
Sub‐Wavelength Antireflection Coatings From Nanostructure Sculptured Thin Films
Abstract
<jats:title>Abstract</jats:title><jats:p>Nanostructure sculptured thin films from SiO<jats:sub>2</jats:sub> are grown on quartz substrates by ion beam sputter deposition using rotating substrate motion accommodated to an oblique angle of incidence for the particle flux. Structural peculiarities of sculptured thin films have an intriguing impact on the optical response upon reflection of light with different wavelengths. The reflectivity of quartz substrates coated with SiO<jats:sub>2</jats:sub> sub‐wavelength nanostructures is simulated by means of effective medium theory and antireflection is predicted for the deep ultraviolet spectral region. Spectroscopic ellipsometry and reflectivity measurements are performed on SiO<jats:sub>2</jats:sub> sculptured thin films and antireflection near <jats:italic>λ</jats:italic> = 193 nm is found. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)</jats:p>