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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Popov, Alexey
VTT Technical Research Centre of Finland
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2024SnS2 Thin Film with In Situ and Controllable Sb Doping via Atomic Layer Deposition for Optoelectronic Applicationscitations
- 2021From Cyclopentasilane to Thin‐Film Transistorscitations
- 2021Dimethylammonium iodide stabilized bismuth halide perovskite photocatalyst for hydrogen evolutioncitations
- 2018Markers of Oxidative Stress in the Exhaled Breath Condensate of Workers Handling Nanocompositescitations
- 2018Partial magnetic ordering in one-dimensional arrays of endofullerene single-molecule magnet peapodscitations
- 2018Deep Airway Inflammation and Respiratory Disorders in Nanocomposite Workerscitations
- 2017Polycyclic heteroaromatic hydrocarbons containing a benzoisoindole corecitations
- 2014Titania nanofibers in gypsum compositescitations
- 2014Gold nanostructures for OCT imaging of capillary flowcitations
- 2013Growth of all-carbon horizontally aligned single-walled carbon nanotubes nucleated from fullerene-based structurescitations
- 2013Plasmon-resonant gold nanoparticles with variable morphology as optical labels and drug carriers for cytological researchcitations
- 2012Understanding High-Yield Catalyst-Free Growth of Horizontally Aligned Single-Walled Carbon Nanotubes Nucleated by Activated C <sub>60</sub> Speciescitations
- 2011Growth of catalyst-assisted and catalyst-free horizontally aligned single wall carbon nanotubescitations
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article
From Cyclopentasilane to Thin‐Film Transistors
Abstract
yclopentasilane (CPS) has been studied as an liquid precursor for the deposition of thin silicon films for printed electronics and related applications. The processing involves a UV‐induced prepolymerization of CPS followed by liquid deposition and low‐temperature thermolysis. An insight into the oligomer and polymer formation including crosslinking in solution using 29Si NMR spectroscopy and electron spin resonance spectroscopy is reported. Formation of SiH (T‐units) and SiH3 (M‐units) is observed as well as short‐lived paramagnetic species. Additionally, the polymerization is followed by Raman spectroscopy. Reactive molecular dynamics simulations are applied to develop a theoretical model for the CPS‐ring‐opening and crosslinking steps. The experimental and computational data correspond well to each other and allow insight into the mechanism of polymer formation. The processing steps include spin‐coating, thermal drying, and conversion to amorphous silicon, H‐passivation, and fabrication of a CPS‐derived thin‐film transistor (TFT), without intermediate silicon crystallization. Further improvement is gained by using tetralene as a solvent, leading to a reduction of the time‐consuming polymerization step by one order of magnitude compared to cyclooctane. The overall quality and characteristics of the CPS‐derived spin‐coated silicon thin films correspond to standard plasma enhanced chemical vapor deposition‐derived devices with respect to performance levels.