| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Ostendorf, Andreas
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (41/41 displayed)
- 2024Temperature-controlled laser processing of shape memory wires
- 2024Optimizing directed energy deposition of polymers through melt pool temperature controlcitations
- 2024Temperature-Controlled Laser Processing of Shape Memory Wires: Spherical Ends as Connectors for System Integrationcitations
- 2024Wafer‐Scale Demonstration of Polycrystalline MoS<sub>2</sub> Growth on 200 mm Glass and SiO<sub>2</sub>/Si Substrates by Plasma‐Enhanced Atomic Layer Depositioncitations
- 2023Plasma-enhanced atomic layer deposition of molybdenum oxide thin films at low temperatures for hydrogen gas sensingcitations
- 2022Low-temperature ALD process development of 200 mm wafer-scale MoS2 for gas sensing applicationcitations
- 2022Impact of cobalt content and grain growth inhibitors in laser-based powder bed fusion of WC-Co
- 2022Nucleation and growth studies of large-area deposited WS(_2) on flexible substrates
- 2021Application of nanoindentation technique to test surface hardness and residual stress of NiTi alloy after femtosecond laser shock peeningcitations
- 2021Laser metal deposition of refractory high-entropy alloys for high-throughput synthesis and structure-property characterization
- 2021Studies on ultra-short pulsed laser shock peening of stainless-steel in different confinement mediacitations
- 2021Raman spectroscopy as an effective tool for characterizing large-area 2D TMDs deposited from the gas phase
- 2021Mode-locked diode laser-based two-photon polymerisationcitations
- 2021Laser shock peening on high-strength steelcitations
- 2021The effect of laser nitriding on surface characteristics and wear resistance of NiTi alloy with low power fiber lasercitations
- 2019Biomimetic structural coloration with tunable degree of angle-independence generated by two-photon polymerization
- 2014Correction to Comparison of in Situ and ex Situ methods for synthesis of two-photon polymerization polymer nanocomposites [Polymers, 6, (2014) 2037-2050]
- 2014Comparison of in situ and ex situ methods for synthesis of two-photon polymerization polymer nanocomposites
- 2014Comparison of (textit {in situ}) and (textit {ex situ}) methods for synthesis of two-photon polymerization polymer nanocomposites
- 2014Comparison of in Situ and ex Situ methods for synthesis of two-photon polymerization polymer nanocomposites (vol 6, 2037, 2014) : [Correction]
- 2012Using laser microfabrication to write conductive polymer/SWNTs nanocomposites
- 2012Laser direct writing of high refractive index polymer/TiO2 nanocomposites
- 2011Using laser microfabrication to write conductive polymer/SWNTs nanocomposites
- 2011Surface texturing by laser cladding
- 2011Wear analysis of fine-structured surfaces made using a single-step laser cladding process
- 2010Biocompability of nanoactuatorscitations
- 2010Biocompability of nanoactuators : stem cell growth on laser-generated nickel-titanium shape memory alloy nanoparticles
- 2008Laser welding of heat treatable steel during induction hardening
- 2008Inductively supported laser beam welding of high and ultra high strength steel grades
- 2008Laser welding of shape memory alloys for medical applications
- 2008Photopolymers with tunable mechanical properties processed by laser-based high-resolution stereolithography
- 2007Femtosecond laser microstructuring of hot-isostatically pressed zirconia ceramic
- 2006Mobiles Laserstrahlhärten
- 2005Direct micro laser cladding with microscale nanophased powders
- 2005Implant prototyping by laser cladding and foaming
- 2005Laser-based thermal forming of shape memory alloy components
- 2005Induction assisted laser beam welding of high strength steel sheets
- 2005Microshaping of densely sintered zirconia ceramic using femtosecond lasers
- 2005Strategies for reduction of processing time in micro-machining of shape memory alloys using ultrashort-pulsed lasers
- 2004Laser based induction of the two-way memory effect into shape memory alloy components
- 2002New development in laser cladding for tool repair
Places of action
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article
Wafer‐Scale Demonstration of Polycrystalline MoS<sub>2</sub> Growth on 200 mm Glass and SiO<sub>2</sub>/Si Substrates by Plasma‐Enhanced Atomic Layer Deposition
Abstract
<jats:title>Abstract</jats:title><jats:p>2D materials like transition metal dichalcogenides (TMDCs) have been widely studied and are a gateway to modern technologies. While research today is mostly carried out on a laboratory scale, there is an intensive need for reliable processes on a wafer‐scale, starting with monolayer‐precise deposition of high‐quality films. In this work, a plasma‐enhanced atomic layer deposition (PEALD) process is developed on a 200 mm SiO<jats:sub>2</jats:sub>/Si substrate. The layers are investigated regarding crystallinity, composition, homogeneity, microstructure, topography, and electrical properties. The process is then applied on 200 mm alkali‐free glass wafers aiming toward flexible electronics and compatibility with Si processes. A complete coverage of the wafer with a satisfying uniformity is achieved on both substrates and direct polycrystalline growth of MoS<jats:sub>2</jats:sub> films is verified on the entire wafer at a substrate temperature of <jats:italic>T </jats:italic>= 230 °C. On glass, the deposited MoS<jats:sub>2</jats:sub> films exhibit a higher crystallinity and are more planar compared to the SiO<jats:sub>2</jats:sub>/Si substrate. Furthermore, application relevant few‐nanometer thick layers are investigated in detail. This low‐temperature process inspires optimism for future direct integration of 2D‐materials in an economical bottom‐up approach on a wide variety of substrates, thus paving the way for industrial mass production.</jats:p>