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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Ali, M. A. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Grillet, Christian
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Topics
Publications (22/22 displayed)
- 2023Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometrycitations
- 2023Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometrycitations
- 2019Post processing dispersion trimming for on-chip mid-infrared supercontinuum generation
- 2015Mid-IR integrated photonics for sensing applicationscitations
- 2012Third-harmonic generation in slow-light chalcogenide glass photonic crystal waveguidescitations
- 2011Third-harmonic generation in engineered slow light photonic crystal waveguides in chalcogenide glasses
- 2011Third-Harmonic generation in slow-light chalcogenide glass photonic crystal waveguidescitations
- 2011Third-harmonic generation in slow-light chalcogenide glass photonic crystal waveguidescitations
- 2010Chalcogenide glass photonic crystalscitations
- 2010Photosensitive and thermal nonlinear effects in chalcogenide photonic crystal cavitiescitations
- 2009Photoinduced high-Q cavities in chalcogenide photonic crystals
- 2009High-Q photonic crystal chalcogenide cavities by photosensitive post processing
- 2009High-Q photonic crystal chalcogenide cavities by photosensitive post processing
- 2009Photowritten high-Q cavities in two-dimensional chalcogenide glass photonic crystalscitations
- 2008Chalcogenide glass photonic crystalscitations
- 2008Characterizing photonic crystal waveguides with an expanded k-space evanescent coupling techniquecitations
- 2008Photo-induced cavities in chalcogenide photonic crystals
- 2007Photosensitive post tuning of chalcogenide photonic crystal waveguidescitations
- 2006Characterization and modeling of Fano resonances in chalcogenide photonic crystal membranescitations
- 2006Efficient coupling to chalcogenide glass photonic crystal waveguides via silica optical fiber nanowirescitations
- 2006Characterization and modeling of Fano resonances in chalcogenide glass photonic crystal membranescitations
- 2005Fabrication of photonic crystal membranes in chalcogenide glasses by focused ion beam milling
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article
Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry
Abstract
<jats:title>Abstract</jats:title><jats:p>Lithium niobate is a material of special interest for its challenging functional properties, which can suit various applications. However, high quality 200‐mm Li<jats:sub>x</jats:sub>Nb<jats:sub>1‐x</jats:sub>O<jats:sub>3</jats:sub> thin film grown on sapphire substrate have never been reported so far which limits these potential applications. This paper reports the efficient optimization of high quality LiNbO<jats:sub>3</jats:sub> thin film deposition on sapphire (001) substrate through chemical beam vapor deposition in a combinatorial configuration. With this technique, flow ratio of Li/Nb can be tuned from ≈0.25 to ≈2.45 on a single wafer. Various complementary characterizations (by means of diffraction, microscopy and spectroscopy techniques) have been performed at different areas of the film (different cationic ratios) in order to investigate the impact of the cationic stoichiometry deviation on the film properties. Close to cationic stoichiometry (LiNbO<jats:sub>3</jats:sub>), the epitaxial films are of high quality (single phase in spite of two in‐plane domains, low mosaicity of 0.04°, low surface roughness, refractive index and band gap close to bulk values). Deviating from the stoichiometry conditions, secondary phases are detected (LiNb<jats:sub>3</jats:sub>O<jats:sub>8</jats:sub> for Nb‐rich flow ratios, and Li<jats:sub>3</jats:sub>NbO<jats:sub>4</jats:sub> with partial amorphization for Li‐rich flow ratios). LiNbO<jats:sub>3</jats:sub> films are of high interest for various key applications in data communications among others.</jats:p>