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Timmons, Richard B.
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article
Plasma-polymerized multistacked organic bipolar films
Abstract
<p>An innovative approach to synthesize totally organic dielectric films based on multi-layered bipolar films produced by plasma-enhanced chemical vapor deposition (PECVD) was investigated. A carboxylic acid (-COOH)-containing monomer, vinylacetic acid (VAA), and an amine (-NH<sub>s</sub>)-containing monomer, allyl amine, were polymerized under pulsed plasma operational conditions. The sequential deposition of AA and VAA films was performed to obtain a multistacked layered structure containing polar groups localized at the interfaces between each consecutive layer. Plasma deposition was varied to control the thickness of the deposited films. It was observed that the high-performance multilayer polymer-film stack, deposited at ambient temperature and not subjected to further treatment of any kind, is favorable in terms of use as a flexible dielectric material.</p>