• Winkler, Robert
• Reisecker, Verena
• Plank, Harald

Abstract

Following Moore‘s law, the performance of devices should double within a<br/>two-year span, which can either be done by reducing the size of the individual<br/>components or adapting the working mechanism. In most cases the same<br/>mantra applies – pushing the size while keeping the quality. As manufacturing<br/>techniques are approaching the atomic scale, however, miniaturization<br/>reaches its intrinsic limit, shifting focus toward higher-dimensional<br/>architectures realized by stacking planar layers or fabricating true,<br/>free-standing nanostructures. A mask-less, additive manufacturing technique<br/>with the capability to produce such 3D structures at the nanoscale is called<br/>Focused Electron Beam Induced Deposition (FEBID). Applying a focused<br/>electron beam in a conventional scanning electron microscope together with a<br/>gaseous metal-precursor gives access to a vast library of complex, 3D<br/>nanostructures, which exhibit feature sizes down to the 10 nm-range and can<br/>be printed in a single step on most substrates. This review aims at<br/>introducing the technique to a broader scientific community, breaking down<br/>the most important processing routes and highlighting disciplines explored<br/>so far ranging from nanooptics and nanomagnetism, over scanning probes<br/>and field emitters to sensing and particle trapping. Finally, a future roadmap<br/>of the technique is discussed, and prospective research focus identified.

Topics

• Deposition
• impedance spectroscopy
• laser emission spectroscopy
• additive manufacturing