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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Beeckman, Jeroen
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2024Vertical coupling between waveguides and optical fibers utilizing polarization gratingscitations
- 2024Solution-processed Pb(Zr,Ti)O3 thin films with strong remnant Pockels coefficientcitations
- 2024Integration Of Solution‐Processed BaTiO<sub>3</sub> Thin Films with High Pockels Coefficient on Photonic Platformscitations
- 2024Piezoelectrically driven Fano resonance in silicon photonics
- 2024Integration of solution‐processed BaTiO3 thin films with high pockels coefficient on photonic platformscitations
- 2023Progress towards a solution-derived (Ba,Ca)(Ti,Zr)O3 film on a Si-based platform as a lead-free alternative
- 2023Textured growth of oxide materials via chemical solution deposition : a case study for electro-optical thin films
- 2023Progress towards piezoelectric (Ba,Ca)(Ti,Zr)O3 thin film using wet chemical solution deposition
- 2023High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulatorscitations
- 2023High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulatorscitations
- 2022Quantum dot lasing from a waterproof and stretchable polymer filmcitations
- 2022Quantum dot lasing from a waterproof and stretchable polymer filmcitations
- 2022PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuitscitations
- 2016Liquid Crystals on Ferroelectric Thin Films
- 2015Lanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: toward integrated active nanophotonic devicescitations
- 2013Preferentially oriented BaTiO3 thin films deposited on silicon with thin intermediate buffer layerscitations
- 2011Wave guides with liquid crystals
- 2010Numerical Simulations of Electrically Induced Birefringence in Photonic Liquid Crystal Fibers
- 2009Design and analysis of LAB on chip liquid crystal biosensor
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article
Integration Of Solution‐Processed BaTiO<sub>3</sub> Thin Films with High Pockels Coefficient on Photonic Platforms
Abstract
<jats:title>Abstract</jats:title><jats:p>The heterogeneous integration of ferroelectric BaTiO<jats:sub>3</jats:sub> thin films on silicon (Si) and silicon nitride (SiN)‐based platforms for photonic integrated circuits (PICs) plays a crucial role in the development of future nanophotonic thin film modulators. Since the electro‐optic (EO) properties of ferroelectric thin films strongly depend on their crystal phase and texture, the integration of BaTiO<jats:sub>3</jats:sub> thin films on these platforms is far from trivial. So far, a conventional integration route using a SrTiO<jats:sub>3</jats:sub> template film in combination with high vacuum deposition methods has been developed, but it has a low throughput, is expensive and requires monocrystalline substrates. To close this gap, a cost‐efficient, high‐throughput and scalable method for integrating highly textured BaTiO<jats:sub>3</jats:sub> films is needed. Therefore, an alternative method for the integration of highly textured BaTiO<jats:sub>3</jats:sub> films using a La<jats:sub>2</jats:sub>O<jats:sub>2</jats:sub>CO<jats:sub>3</jats:sub> template film in combination with a chemical solution deposition (CSD) process is presented. In this work, the structural and EO properties of the solution‐processed BaTiO<jats:sub>3</jats:sub> film are characterized and its integration into an optical ring resonator is evaluated. The BaTiO<jats:sub>3</jats:sub> film exhibits a fiber texture, has a large Pockels coefficient (<jats:italic>r<jats:sub>eff</jats:sub></jats:italic>) of 139 pm V<jats:sup>−1</jats:sup>, and integration into a ring resonator‐based modulator shows a <jats:italic>V<jats:sub>π</jats:sub>L</jats:italic> of 1.881 V cm and a bandwidth of > 40 GHz. This enables low‐cost, high‐throughput, and flexible integration of BaTiO<jats:sub>3</jats:sub> films on PIC platforms and the potential large‐scale fabrication of nanophotonic BaTiO<jats:sub>3</jats:sub> thin‐film modulators.</jats:p>