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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Schenk, Tony
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Publications (8/8 displayed)
- 2024Strain as a Global Factor in Stabilizing the Ferroelectric Properties of ZrO₂citations
- 2024Strain as a Global Factor in Stabilizing the Ferroelectric Properties of ZrO<sub>2</sub>citations
- 2023Strain as a global factor in stabilizing the ferroelectric properties of ZrO 2citations
- 2020Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Filmcitations
- 2019Local structural investigation of hafnia-zirconia polymorphs in powders and thin films by X-ray absorption spectroscopycitations
- 2018Effect of Annealing Ferroelectric HfO₂ Thin Films: In Situ, High Temperature X-Ray Diffractioncitations
- 2018Origin of Temperature-Dependent Ferroelectricity in SiDoped HfO₂citations
- 2018Atomic Structure of Domain and Interphase Boundaries in Ferroelectric HfO₂citations
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article
Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film
Abstract
<jats:title>Abstract</jats:title><jats:p>Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device based on a piezoelectric thin film is demonstrated. The antisymmetric Lamb mode induced at 73 kHz allows for a functional performance that fulfills all conditions for practical use. Out‐of‐plane displacement reaches 2.9 µm when 150 V unipolar voltage is applied. The average transmittance of the whole transducer reaches 75%. The key points of this technology are: 1) a thin HfO<jats:sub>2</jats:sub> layer between lead zirconate titanate film and substrate that prevents chemical reaction between them; 2) the efficient integration of transparent indium tin oxide electrodes and solution‐derived piezoelectric lead zirconate titanate thin film onto optical‐grade fused silica; and 3) the use of a transparent insulating layer made of SU‐8 photoresist.</jats:p>