• Rupin, Matthieu
• Godard, Nicolas
• Girod, Stéphanie
• Glinsek, Sebastjan
• Mahjoub, Mohamed Aymen
• Chappaz, Cédrick
• Leturcq, Renaud
• Schenk, Tony
• Chemin, Jeanbaptiste
• Defay, Emmanuel
• Klein, Sébastien
• Valle, Nathalie

Abstract

<jats:title>Abstract</jats:title><jats:p>Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device based on a piezoelectric thin film is demonstrated. The antisymmetric Lamb mode induced at 73 kHz allows for a functional performance that fulfills all conditions for practical use. Out‐of‐plane displacement reaches 2.9 µm when 150 V unipolar voltage is applied. The average transmittance of the whole transducer reaches 75%. The key points of this technology are: 1) a thin HfO<jats:sub>2</jats:sub> layer between lead zirconate titanate film and substrate that prevents chemical reaction between them; 2) the efficient integration of transparent indium tin oxide electrodes and solution‐derived piezoelectric lead zirconate titanate thin film onto optical‐grade fused silica; and 3) the use of a transparent insulating layer made of SU‐8 photoresist.</jats:p>

Topics

• impedance spectroscopy
• thin film
• tin
• Indium