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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Carta, D.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2021Atomic-Scale Structural Characterization of Silver-Doped Phosphate-Based Glasses Prepared by Coacervationcitations
- 2020Mesoporous Phosphate-Based Glasses Prepared via Sol–Gel
- 2019Antibacterial Copper-Doped Calcium Phosphate Glasses for Bone Tissue Regeneration
- 2016Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopycitations
- 2016Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy.citations
- 2016Spatially resolved TiO x phases in switched RRAM devices using soft X-ray spectromicroscopycitations
- 2016Role and optimization of the active oxide layer in TiO2-based RRAMcitations
- 2014Direct sol-gel synthesis of doped cubic mesoporous SBA-16 monolithscitations
- 2014Direct sol-gel synthesis of doped cubic mesoporous SBA-16 monolithscitations
- 2013EDS, HRTEM/STEM, and X-ray absorption spectroscopy studies of co-substituted maghemite nanoparticlescitations
- 2013Cubic mesoporous silica (SBA-16) prepared using butanol as the co-surfactant: A general matrix for the preparation of FeCo-SiO2 nanocompositescitations
- 2013Cubic mesoporous silica (SBA-16) prepared using butanol as the Co-surfactant : a general matrix for the preparation of FeCo-SiO2 nanocompositescitations
- 2011Influence of particles alloying on the performances of Pt-Ru/CNT catalysts for selective hydrogenationcitations
- 2009A Structural and magnetic investigation of the inversion degree in ferrite nanocrystals mfe2o4 (M = Mn, Co, Ni)citations
Places of action
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article
Role and optimization of the active oxide layer in TiO2-based RRAM
Abstract
TiO<sub>2</sub> is commonly used as the active switching layer in resistive random access memory. The electrical characteristics of these devices are directly related to the fundamental conditions inside the TiO<sub>2</sub> layer and at the interfaces between it and the surrounding electrodes. However, it is complex to disentangle the effects of film “bulk” properties and interface phenomena. The present work uses hard X-ray photoemission spectroscopy (HAXPES) at different excitation energies to distinguish between these regimes. Changes are found to affect the entire thin film, but the most dramatic effects are confined to an interface. These changes are connected to oxygen ions moving and redistributing within the film. Based on the HAXPES results, post-deposition annealing of the TiO<sub>2</sub> thin film was investigated as an optimisation pathway in order to reach an ideal compromise between device resistivity and lifetime. The structural and chemical changes upon annealing are investigated using X-ray absorption spectroscopy and are further supported by a range of bulk and surface sensitive characterisation methods. In summary, it is shown that the management of oxygen content and interface quality is intrinsically important to device behavior and that careful annealing procedures are a powerful device optimisation technique.