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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Pauly, Christoph
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Impact of Sample Preparation Approach on Transmission Electron Microscopy Investigation of Sputtered AlNi Multilayers Used for Reactive Solderingcitations
- 2024How to achieve nanometer flat surfaces: Pulsed electrochemical machining of bulk metallic glass
- 2024RuAl Thin‐Film Deposition by DC Magnetron Sputtering
- 2023Effects of Ultrashort Pulsed Direct Laser Writing on Ni/Al Reactive Multilayer Foilscitations
- 2023A Detailed Analysis of the Microstructural Changes in the Vicinity of a Crack-Initiating Defect in Additively Manufactured AISI 316L
- 2023Impact of Microstructure of Nanoscale Magnetron Sputtered Ru/Al Multilayers on Thermally Induced Phase Formationcitations
- 2022Critical Assessment of Two-Dimensional Methods for the Microstructural Characterization of Cemented Carbides
- 2021Phase transformation and characterization of 3D reactive microstructures in nanoscale Al/Ni multilayerscitations
- 2021Phase Transformation and Characterization of 3D Reactive Microstructures in Nanoscale Al/Ni Multilayerscitations
- 2019Effect of Pretreatment on Interface Stability and Morphology of Ni/Al Hybrid Foams by in situ Microcantilever Fracture Experiment
- 2019Eutectic modification by ternary compound cluster formation in Al-Si alloyscitations
- 2019Micromechanical investigations of CVD coated WC-Co cemented carbide by micropillar compression
- 2018Investigations on micro-mechanical properties of polycrystalline Ti(C,N) and Zr(C,N) coatings
- 2017Selbstfortschreitende Reaktionen in Ru/Al/X-Multilagen
- 2016Constrained hierarchical twinning in Ru-based high temperature shape memory alloyscitations
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article
RuAl Thin‐Film Deposition by DC Magnetron Sputtering
Abstract
The intermetallic transition metal B2-structured aluminide RuAl is a candidate material for use in various applications, including microelectronics and structural materials under demanding conditions, for example, as oxidation- and corrosionresistantmaterials. In contrast to other B2 transition metal aluminides, which usually suffer from brittle material behavior at room temperature, RuAl exhibits comparatively good room-temperature ductility, in combination with further promising properties. Therefore, RuAl thin films are attracting interest as potential protective and functional surface engineering materials. The synthesis of RuAl thin films by physical vapor deposition, especially magnetron sputtering, is however complex and utilizes codeposition and multilayer from elemental sputtering targets and subsequent annealing procedures. Herein, an alternative route toward single-phase B2-structured RuAl thin films by nonreactive DC magnetron sputter deposition at low substrate temperature from a powdermetallurgically manufactured Ru50Al50 compound target is described. The influence of the deposition parameters on the constitution, microstructure, and selected properties of RuAl thin films is studied. It is shown that especially the Ar process gas pressure has a significant impact on their composition and morphology. X-ray diffraction and transmission electron microscopy with selected-area electron diffraction indicate that the films are single-phase RuAl with B2 structure.