| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Schweizer, Peter
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2024Temporally-resolved decomposition of Ti 0.12 Al 0.21 B 0.67 thin films at 1000 °Ccitations
- 2024Temporally-resolved decomposition of Ti0.12Al0.21B0.67 thin films at 1000°Ccitations
- 2024Unraveling the highly plastic behavior of ALD‐aluminum oxide encapsulations by small‐scale tensile testingcitations
- 2024Unraveling interdiffusion phenomena and the role of nanoscale diffusion barriers in the copper-gold systemcitations
- 2024Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testingcitations
- 2024Well-defined synthesis of crystalline MnO, Mn 2 O 3 , and Mn 3 O 4 phases by anodic electrodeposition and calcinationcitations
- 2023Microwave plasma-assisted reactive HiPIMS of InN films: plasma environment and material characterisationcitations
- 2023Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisationcitations
- 2023Surface chemistry dictates the osteogenic and antimicrobial properties of palladium-, platinum-, and titanium-based bulk metallic glassescitations
- 2022Composition dependent electrical transport in Si 1−x Ge x nanosheets with monolithic single-elementary Al contactscitations
- 2022Monolithic and single-crystalline aluminum-silicon heterostructurescitations
Places of action
| Organizations | Location | People |
|---|
article
Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testing
Abstract
<jats:p>We present a study directly measuring the electron‐beam‐induced plasticity of amorphous Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> coatings. Core–shell nanostructures are employed as small‐scale model systems for two‐dimensional coatings made by atomic layer deposition (ALD). Copper nanowires (NWs) are used as substrates for ALD deposition, representing a model system for interconnects commonly found in integrated circuits. Experiments are performed in situ in a transmission electron microscope (TEM) and further analyzed with electron energy loss spectroscopy (EELS). Our in situ TEM tensile experiments reveal the highly plastic behavior of the ALD shell, which withstands a maximum strain of 188%. Comparable samples under beam‐off conditions show a brittle fracture, which underlines the effect of electron irradiation. The electron‐beam‐activated bond switching within the amorphous network enables compensation of the applied tensile strain, leading to viscous flow. By incorporating an intermediate nanocrystalline layer within the Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> shell, the plasticity is suppressed and brittle fracture occurs. This work directly demonstrates the tuning of mechanical properties in amorphous ALD structures through electron irradiation.</jats:p>