| People | Locations | Statistics |
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| Ferrari, A. |
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| Schimpf, Christian |
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| Dunser, M. |
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| Thomas, Eric |
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| Gecse, Zoltan |
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| Tsrunchev, Peter |
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| Della Ricca, Giuseppe |
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| Cios, Grzegorz |
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| Hohlmann, Marcus |
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| Dudarev, A. |
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| Mascagna, V. |
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| Santimaria, Marco |
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| Poudyal, Nabin |
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| Piozzi, Antonella |
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| Mørtsell, Eva Anne |
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| Jin, S. |
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| Noel, Cédric |
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| Fino, Paolo |
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| Mailley, Pascal |
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| Meyer, Ernst |
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| Zhang, Qi |
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| Pfattner, Raphael | Brussels |
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| Kooi, Bart J. |
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| Babuji, Adara |
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| Pauporte, Thierry |
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Hamann, S.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2016Structural and multifunctional properties of magnetron-sputtered Fe-P(-Mn) thin filmscitations
- 2014The Bain library: A Cu-Au buffer template for a continuous variation of lattice parameters in epitaxial filmscitations
- 2014Chemical study of H2/CH4 and H2/CH4/B2H6 microwave plasmas at high pressure/power by TDLAS measurements
- 2014Investigation of H2/CH4 and H2/CH4/B2H6 high pressure-high power microwave plasma chemistry using IR-TDLAS
- 2012Thickness-dependence of the B2-B19 martensitic transformation in nanoscale shape memory alloy thin films: Zero-hysteresis in 75 nm thick Ti(51)Ni(38)Cu(11) thin filmscitations
- 2011Modular high-throughput test stand for versatile screening of thin-film materials librariescitations
- 2011Small-Scale Deposition of Thin Films and Nanoparticles by Microevaporation Sourcescitations
- 2011Reversible fcc <-> bcc transformation in freestanding epitaxially grown Fe-Pd ferromagnetic shape memory filmscitations
- 2011High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopycitations
- 2010Development and characterization of Fe(70)Pd(30) ferromagnetic shape memory splatscitations
- 2010Correlation of phase transformations and magnetic properties in annealed epitaxial Fe-Pd magnetic shape memory alloy filmscitations
- 2010Integrity of Micro-Hotplates During High-Temperature Operation Monitored by Digital Holographic Microscopycitations
- 2010The ferromagnetic shape memory system Fe-Pd-Cucitations
- 2010Artificial Single Variant Martensite in Freestanding Fe(70)Pd(30) Films Obtained by Coherent Epitaxial Growthcitations
- 2008Development of multifunctional thin films using high-throughput experimentation methodscitations
- 2008Micro-hotplates for high-throughput thin film processing and in situ phase transformation characterizationcitations
Places of action
conferencepaper
Investigation of H2/CH4 and H2/CH4/B2H6 high pressure-high power microwave plasma chemistry using IR-TDLAS
Abstract
International audience ; Infrared tunable diode laser absorption spectroscopy (IR TDLAS) technique [1,2] has been used in a high pressure microwave (2.45 GHz) stainless steel reactor dedicated to diamond films deposition for electronic applications. Line integrated absorption measurements have been performed in H2/CH4 and H2/CH4/B2H6 plasmas in order to monitor hydrocarbon species (CH3, CH4, C2H2, C2H4 and C2H6) and diborane (B2H6). The densities of the detected species were in the range of 1012 - 1017cm-3. Parametric studies as a function of pressure-microwave power couple and gas composition (admixtures of methane and diborane) have been carried out on wide ranges of experimental conditions, especially for high pressure (³ 200 mbar) and high power (³ 3 kW). The results show an increase of the degree of dissociation of CH4 and B2H6 with pressure and power. C2H2 is the most abundant reaction product. The concentration of CH3 within the plasma bulk was detected to about 1013 cm‑3 and only for the lowest power density conditions. In the presence of methane the concentration of diborane is below the limit of detection of about 5*1011cm‑3.