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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Melzer, Marcel
Fraunhofer Institute for Electronic Nano Systems
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (7/7 displayed)
- 2022Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrorscitations
- 2022Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrorscitations
- 2021Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial arraycitations
- 2021Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitridecitations
- 2020On the relationship between SiF4plasma species and sample properties in ultra low-k etching processes
- 20202D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitridecitations
- 2016Manganese half-sandwich complexes as metal-organic chemical vapor deposition precursors for manganese-based thin filmscitations
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