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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Bourbon, Gilles
STMicroelectronics (United Kingdom)
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2022Viscoelastic properties of plant fibers - Dynamic analysis and nanoindentation tests
- 2022Towards integrated health monitoring of bio-based composite structures : influence of acoustic emission sensor embedment on material integrity
- 2021CMUT-Based Sensor for Acoustic Emission Application: Experimental and Theoretical Contributions to Sensitivity Optimizationcitations
- 2020Towards a better understanding of the CMUTs potential for SHMapplications
- 2019Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer
- 2019Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer
- 2019CMUT sensors based on circular membranes array for SHM applications
- 2017Modal parameter identification of a CMUT membrane using response data only
- 2016Characterization of capacitive micromachined ultrasonic transducers
- 2000The two way shape memory effect of shape memory alloys: an experimental study and a phenomenological model
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document
CMUT sensors based on circular membranes array for SHM applications
Abstract
A MEMS sensor dedicated to SHM applications is presented. The MEMS is made of a Capacitive Micromachined Ultrasonic Transducer (CMUT) chip composed of circular membranes array. The radius of the membranes vary between 50 µm and 250 µm and hence the associated resonance frequencies between 80 kHz and 2 MHz. A wide frequency bandwidth is then available for acoustic measurements. A testing campaign is conducted in order to characterize the MEMS sensor's behavior when subjected to single-frequency and broadband excitation stimuli. The single-frequency excitations are produced with specific piezoelectric transducers from 300 kHz to 800 kHz. The Fast Fourier Transform (FFT) of the measured signal from the CMUT is centered as expected on the excitation frequency. The broadband excitation is obtained with a pencil lead break. In this case, the FFT of the measured signal is centered on the resonance frequency of the membrane. These characterizations point out the DC bias voltage applied to the CMUT as a major parameter for controlling the sensitivity of the sensor. The CMUT sensor proves to be sufficiently sensitive to monitor these sources. This work highlights the relevant prospective capacities of the CMUT sensor to collect data in structural health monitoring applications. This sensor technology could be externally deployed, or even integrated into a composite structure, in order to monitor the structure by the CMUT detection, either by active ultrasound tests or by passive acoustic emission.