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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Zhou, H.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2023Quantitative mineralogy, mineral chemistry and microtex-tural data on the UG2 chromitite intruded by iron-rich ul-tramafic pegmatite (IRUP) at the Thaba Mine, northwest-ern Bushveld Complex, South Africa
- 2019Life Prediction of Phosphor Bronze Reinforcing Tape Used in Underground Power Cablescitations
- 2017Enhanced photoelectrochemical behavior of H-TiO2 nanorods hydrogenated by controlled and local rapid thermal annealingcitations
- 2014Bipolar porous polymeric frameworks for low-cost, high-power, long-life all-organic energy storage devicescitations
- 2013Evaluation of fracture mechanics parameters for bimaterial compact tension specimenscitations
- 2013Aromatic porous-honeycomb electrodes for a sodium-organic energy storage devicecitations
- 2012Bone Material Properties in Premenopausal Women With Idiopathic Osteoporosiscitations
- 2012An energy storage principle using bipolar porous polymeric frameworkscitations
- 2009III-V MOSFET Fabrication and Device (Fabrication process of e.g. group III-V MOSFET for nano complementary metal oxide semiconductor application, involves heat treating metal contact structure to produce alloy region within semiconductor substrate)
- 2008Ino.75Gao.25As channel III–V MOSFETs with leading performance metrics
- 2007Bone quality in mild primary hyperparathyroidism
Places of action
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patent
III-V MOSFET Fabrication and Device (Fabrication process of e.g. group III-V MOSFET for nano complementary metal oxide semiconductor application, involves heat treating metal contact structure to produce alloy region within semiconductor substrate)
Abstract
A semiconductor fabrication process includes forming a gate dielectric layer (120) overlying a substrate (101) that includes a III-V semiconductor compound. The gate dielectric layer is patterned to produce a gate dielectric structure (121) that has a substantially vertical sidewall (127), e.g., a slope of approximately 45.degree. to 90.degree.. A metal contact structure (130) is formed overlying the wafer substrate. The contact structure is laterally displaced from the gate dielectric structure sufficiently to define a gap (133) between the two. The wafer (100) is heat treated, which causes migration of at least one of the metal elements to form an alloy region (137) in the underlying wafer substrate. The alloy region underlies the contact structure and extends across all or a portion of the wafer substrate underlying the gap. An insulative or dielectric capping layer (140,150) is then formed overlying the wafer and covering the portion of the substrate exposed by the gap.