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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Deleruyelle, Damien
Institut National des Sciences Appliquées de Lyon
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (26/26 displayed)
- 2024Development of ferroelectric and antiferroelectric H1-xZrxO2-based capacitors for non-volatile memories and power supply applications
- 2024Serendipity in materials science: how a simple doping leads to novel and outstanding properties in simple dielectric HfO2 !
- 2024Stabilization of low dimensional ferroelectric HfZrO2 film
- 2023How ALD deposition analysis can help PVD deposition process!
- 2023How ALD deposition analysis can help PVD deposition process!
- 2023Engineering the nano and micro structures of sputtered HfZrO2 thin films
- 2023Engineering the nano and micro structures of sputtered HfZrO2 thin films
- 2023Interplay between Strain and Defects at the Interfaces of Ultra‐Thin Hf 0.5 Zr 0.5 O 2 ‐Based Ferroelectric Capacitorscitations
- 2023Interplay between Strain and Defects at the Interfaces of Ultra‐Thin Hf 0.5 Zr 0.5 O 2 ‐Based Ferroelectric Capacitorscitations
- 2023Interface engineering between HfZrO2 thin films and electrodes for enhanced ferroelectricity
- 2023Interface engineering between HfZrO2 thin films and electrodes for enhanced ferroelectricity
- 2022Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced properties
- 2022Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layercitations
- 2022Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layercitations
- 2022A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching
- 2022A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching
- 2022How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical properties
- 2021Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application
- 2021Bottom electrodes impact on Hf0.5Zr0.5O2 ferroelectric tunnel junctions
- 2021Bottom electrodes impact on Hf0.5Zr0.5O2 ferroelectric tunnel junctions
- 2021Effect of bottom electrodes on HZO thin film properties
- 2021Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications
- 2021Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications
- 2021Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions
- 2021Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions
- 2014Photo-Cross-Linked Diblock Copolymer Micelles: Quantitative Study of Photochemical Efficiency, Micelles Morphologies and their Thermal Behaviorcitations
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document
A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching
Abstract
Polarization switching phenomena in ferroelectrics are complex processes entangled to electronic, chemical and (micro)(nano)structural properties, and intrinsic and extrinsic defects. These phenomena become critical in the framework of ferroelectric nanostructures, e.g. integrated thin films, where interface and surface effects dominate against volume-related properties. Here, we explore the mechanical and electrical polarization switching of ferroelectric thin films of the prototypical tetragonal ferroelectric PbZr0.2Ti0.8O3 (PZT). Using different parameters for sol-gel derived processing and rapid thermal annealing crystallization, we gain control over the electrical properties, chemistry and nanostructure of epitaxial PZT thin films of different thicknesses. The ferroelectric properties determined from microcapacitors indicate that polarization switching under electric field is compatible with out-of-plane c-oriented tetragonal PZT, depicting bulk-like remnant polarization values for films thicker than 100 nm. In capacitors based on films less than 100 nm thick as well as in those undergoing different crystallization processes, a decrease of the measured remnant polarization and the appearance of a leakage current are observed. Piezoresponse force microscopy was used to understand the nanoscale nature of the ferroelectric properties and the polarization switching under different stimuli of these films and environment. Through application of voltage and/or stress using the atomic force microscope tip, and under different electrical boundary conditions, we studied nucleation and switching phenomena in as-grown and in electrically and stress-induced patterned ferroelectric domains. Coercive electric fields and threshold forces required for polarization switching are not only dependent on the conditions of poling, but also on the structure, chemical and electronic properties, and concentration of defects, which we analyzed at different scales using X-ray diffraction and photoemission spectroscopy, scanning electron transmission microscopy, electron energy loss spectroscopy, and Rutherford backscattering and secondary ion mass spectrometry. Phase field simulations of PZT films depicting nanoscale defects support the experimental evidence of the significant contribution of the strain gradient leading to nanomechanical switching. Our results on polarization switching in epitaxial sol-gel derived PZT films will be discussed in the framework of integrated ferroelectric thin films and nanoscale ferroelectric switching for nanomechanical applications in stress sensors.