• Douaud, Alexandre
• Thibault, Tristan
• Jean, Philippe
• Messaddeq, Younès

Abstract

<jats:p>Heterogeneous integration of materials with a negative thermo-optic coefficient is a simple and efficient way to compensate the strong detrimental thermal dependence of silicon-on-insulator devices. Yet, the list of materials that are both amenable for photonics fabrication and exhibit a negative TOC is very short and often requires sacrificing loss performance. In this work, we demonstrate that As<jats:sub>20</jats:sub>S<jats:sub>80</jats:sub> chalcogenide glass thin-films can be used to compensate silicon thermal effects in microring resonators while retaining excellent loss figures. We present an experimental characterization of the glass thin-film and of fabricated hybrid microring resonators at telecommunication wavelengths. Nearly athermal operation is demonstrated for the TM polarization with an absolute minimum measured resonance shift of 5.25 pm K<jats:sup>−1</jats:sup>, corresponding to a waveguide effective index thermal dependence of 4.28×10<jats:sup>-6</jats:sup> RIU/K. We show that the thermal dependence can be controlled by changing the cladding thickness and a negative thermal dependence is obtained for the TM polarization. All configurations exhibit unprecedented low loss figures with a maximum measured intrinsic quality factor exceeding 3.9 × 10<jats:sup>5</jats:sup>, corresponding to waveguide propagation loss of 1.37 dB cm<jats:sup>−1</jats:sup>. A value of−4.75(75)×10<jats:sup>-5</jats:sup> RIU/K is measured for the thermo-optic coefficient of As<jats:sub>20</jats:sub>S<jats:sub>80</jats:sub> thin-films.</jats:p>

Topics

• impedance spectroscopy
• glass
• glass
• Silicon