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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Dias, Carlos
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2023Study of the mesomorphic properties and conductivity of n-alkyl-2-picolinium ionic liquid crystalscitations
- 2019Tailoring IGZO composition for enhanced fully solution-based thin film transistorscitations
- 2016Accessing the Physical State and Molecular Mobility of Naproxen Confined to Nanoporous Silica Matrixescitations
- 2013New method to analyze dielectric relaxation processescitations
- 2013Enhancing the Response of Chemocapacitors with Electrospun Nanofiber Filmscitations
- 2012Sintering,Crystallization and Dielectric Behavior of Barium Zinc Borosilicate Glasses - Effect of Barium Oxide substitution for Zinc Oxidecitations
- 2012Understanding the Ion Jelly Conductivity Mechanismcitations
- 2010Charge Carriers Injection/Extraction at the Metal-Polymer Interface and Its Influence in the Capacitive Microelectromechanical Systems-Switches Actuation Voltage
- 2006Development of an ultrasonic motor based on a piezoelectric ceramic sandwiched between two laminate composite plates
- 2006Changes in molecular dynamics upon formation of a polymer dispersed liquid crystalcitations
- 2005Ultrasound role in sol-gel processing of PbTiO3 ceramics
- 2004Capacitance response of polysiloxane films with interdigital electrodes to volatile organic compoundscitations
- 2004Analytical evaluation of the interdigital electrodes capacitance for a multi-layered structurecitations
- 2004Recent Advances in Ceramic-polymer Composite Electretscitations
- 2002Smart materials: the functional properties of ceramic/polymer composites and their relation to sol-gel powder preparationcitations
- 2002Dielectric characterization of PEBA and PDMS for capacitive interdigital vapour sensorscitations
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document
Charge Carriers Injection/Extraction at the Metal-Polymer Interface and Its Influence in the Capacitive Microelectromechanical Systems-Switches Actuation Voltage
Abstract
Opposite results concerning the sign of the parasitic charge accumulated at the metal dielectric contact in RF microelectromechanical systems (MEMS) capacitive switches are found in the literature. The mechanism concerning charge injection/extraction at the metal-dielectric contact and its influence on the pull-in voltage needs to be further clarified. A model-switch, for which only one dimension is in the microns range, is used to study the behaviour of a capacitive RF MEMS switch. The aim is to analyze how the electric charge is injected/extracted into or from the dielectric material under the applied field and to obtain realistic data to understand how this parasitic charge influences the pull-in voltage V-pi and the pull-off voltage V-po. A triangle voltage is employed to measure V-pi and V-po by measuring the isothermal charging/discharging currents. Our results demonstrate that V-pi is strongly dependent on the injected/extracted charge on the free surface of the dielectric. The charge injected/extracted at the bottom side of the dielectric has no influence on the actuation voltage. The charge injected/extracted on the free surface of the dielectric determines an increase of the modulus of V-pi and, eventually, the switch can fail to actuate. An estimation of the charge stored into the material was obtained (i) by measuring the charging current and the discharging current and (ii) from the value of the V-pi. The parasitic charge necessary to keep the bridge stick to the insulator is 5.3 x 10(-4) cm(-2) for our experimental conditions. The modification of the V-pi determined by the stored charge in the dielectric is analyzed. An increase of the relative dielectric permittivity by a factor of 2 produces a decrease of the actuation voltage of 10%. A variation of 30% in the elastic constant determines a variation of about 20% in the V-pi. A voltage threshold for charge injection/extraction was not observed.