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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Ferreira, I.
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Publications (8/8 displayed)
- 2024Highly Efficient and Magnetically Recyclable Non-Noble Metal Fly Ash-Based Catalysts for 4-Nitrophenol Reductioncitations
- 2021The effect of deposition process parameters on thin film coatings for the Athena X-ray opticscitations
- 2021The effect of deposition process parameters on thin film coatings for the Athena X-ray opticscitations
- 2020Machinability of PA12 and short fibre-reinforced PA12 materials produced by fused filament fabricationcitations
- 2019Additive manufacturing of polyethylene terephthalate glycol/carbon fiber composites: An experimental study from filament to printed partscitations
- 2014Broadband photocurrent enhancement in a-Si:H solar cells with Plasmonic back reflectorscitations
- 2002Metal-ferroelectric thin film devicescitations
- 2002Optical and photoelectric properties of PZT films for microelectronic applications
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document
The effect of deposition process parameters on thin film coatings for the Athena X-ray optics
Abstract
<p>The thin film coating technology for the European Space Agency mission, Advanced Telescope for High-Energy Astrophysics (Athena) has been established. The X-ray optics of the Athena telescope is based on Silicon Pore Optics (SPO) technology which is enhanced by the thin film coatings deposited on the reflective surface of the SPO plates. In this work, we present a literature study of the coating process parameter space and provide an overview of the thin film properties with a focus on micro roughness, chemical composition and wear resistance when deposited under various process conditions. We determined, that the thin film density depends strongly on the mobility of the adatoms on the substrate surface. Some coating process parameters, which have a significant impact on the adatom mobility are the discharge voltage, the working gas pressure and the substrate temperature.</p>