| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Franssila, Sami
Aalto University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (16/16 displayed)
- 2022Microfabrication atomic layer deposited Pt NPs/TiN thin film on silicon as a nanostructure signal Transducer: Electrochemical characterization toward neurotransmitter sensingcitations
- 2021Fabrication of elastic, conductive, wear-resistant superhydrophobic composite materialcitations
- 2020Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testcitations
- 2019Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carboncitations
- 2018Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge testcitations
- 2018Platinum recovery from Industrial Process Solutions by Electrodepo-sition-Redox Replacement
- 2016Cellulose nanofibril film as a piezoelectric sensor materialcitations
- 2016Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etchingcitations
- 2016Novel nanostructure replication process for robust superhydrophobic surfacescitations
- 2016Robust hybrid elastomer/metal-oxide superhydrophobic surfacescitations
- 2015Fracture properties of atomic layer deposited aluminum oxide free-standing membranescitations
- 2013Laser direct writing of thick hybrid polymer microstructurescitations
- 2010Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensorscitations
- 2009Carbon nanotube thin film transistors based on aerosol methodscitations
- 2007Glass microfabricated nebulizer chip for mass spectrometrycitations
- 2006Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchipcitations
Places of action
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document
Laser direct writing of thick hybrid polymer microstructures
Abstract
<p>This work presents patterning of thick (10-50 μm) hybrid polymer structures in ORMOCER (Organically Modified Ceramics) by rapid laser direct writing (LDW). ORMOCERs combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for biochips. In our study, different process parameters of laser-writer were studied, in order to find the optimal dose for each of the laser beam spot sizes and for different ORMOCOMP® layer thickness. LDW enables superior control over structure geometry and different shapes i.e. pillars, ridges and triangles were written in a single step on silicon substrate. Round pillars of height 49 μm (spinned at 2000 rpm) were obtained using optimized process parameters of laser writer. The ORMOCOMP® triangles of 10 μm height corresponding to spin coating at 10000 rpm with 30°, 45°and 90°angles were obtained. The sharpness of corners in these triangles (a few micrometers) indicates that LDW of ORMOCOMP® microstructures has advantages over proximity lithography and is useful for applications requiring high definition and edge roughness. Microfluidic directional wetting (fluidic diode) replicated in ORMOCOMP® by LDW was also tested. The objective of this work is to design and to fabricate micrometer range chips patterned by LDW for microfluidic applications.</p>