| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Dekker, Ronald
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (11/11 displayed)
- 2023A Comparative Study of Si3N4 and Al2O3 as Dielectric Materials for Pre-Charged Collapse-Mode CMUTscitations
- 2023An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implantscitations
- 2023Flip-chip bonding of InP die on SiN-based TriPleX carrier with novel laser solderingcitations
- 2023Flip-chip bonding of InP die on SiN-based TriPleX carrier with novel laser solderingcitations
- 2022Photonic flip-chip assembly of InP on TriPleX with laser soldering
- 2022Photonic flip-chip assembly of InP on TriPleX with laser soldering
- 2021The long-term reliability of pre-charged CMUTs for the powering of deep implanted devicescitations
- 2021Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfercitations
- 2020Embedded High-Density Trench Capacitors for Smart Catheterscitations
- 2019Effect of Signals on the Encapsulation Performance of Parylene Coated Platinum Tracks for Active Medical Implantscitations
- 2015Silicon-Based Technology for Integrated Waveguides and mm-Wave Systemscitations
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document
The long-term reliability of pre-charged CMUTs for the powering of deep implanted devices
Abstract
Recently, focused ultrasound has been proposed to power deeply implanted medical devices. Almost exclusively, lead zirconate titanate (PZT) transducers are used to convert acoustic energy into electrical energy. Unfortunately, these lead containing devices cannot be hermetically encapsulated since that would block the ultrasound. We propose the use of biocompatible Capacitive Micromachined Ultrasonic Transducer (CMUT) elements to replace traditional PZT transducers. In addition, to eliminate the external bias voltage, we introduced a charge trapping Al2O3 layer inside the CMUT to create a built-in bias voltage. These devices can be pre-charged and used as a receiver for US power. In this work, the viability of charged CMUTs to power deep implants was explored by investigating the effect of the charging parameters and by performing Accelerated Lifetime Tests (ALT). The estimated lifetime at body temperature ranges between 2.5 to 3.5 years at body temperature, which significantly depends on the charging parameters.