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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Wlodarczyk, Krystian L.
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2022A Novel Process for Manufacturing High-Friction Rings with a Closely Defined Coefficient of Static Friction (Relative Standard Deviation 3.5%) for Application in Ship Engine Componentscitations
- 2021Laser-manufactured glass microfluidic devices with embedded sensors
- 2021Maskless laser prototyping of glass microfluidic devices
- 2019Interlaced Laser Beam Scanning: A Method Enabling an Increase in the Throughput of Ultrafast Laser Machining of Borosilicate Glasscitations
- 2018Laser-based fabrication of microfluidic devices for porous media applicationscitations
- 2018Rapid Laser Manufacturing of Microfluidic Devices from Glass Substratescitations
- 2017Fabrication of three-dimensional micro-structures in glass by picosecond laser micro-machining and welding
- 2017Laser spot welding of laser textured steel to aluminiumcitations
- 2017Anti-counterfeiting security markings for metal goods
- 2015Electrodeposited magnetostrictive Fe-Ga alloys for miniaturised actuatorscitations
- 2015Laser surface texturing for high friction contactscitations
- 2015Laser processing of thin flex glass for microelectronic, OLED lighting, display and PV applications
- 2014Nanosecond laser texturing for high friction applicationscitations
- 2014Laser texturing for high friction applicationscitations
- 2012Generation of optical quality structured surfaces on borosilicate glass using 515nm picosecond laser pulses and a liquid-crystal-based spatial light modulator
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document
Electrodeposited magnetostrictive Fe-Ga alloys for miniaturised actuators
Abstract
<p>The application of magnetostrictive materials in MEMS devices requires the development of suitable micromachining technologies for the deposition and patterning at the microscale. Some alloys of iron and gallium, generally classified under the generic name of Galfenol (Fe<sub>1-x</sub>-Ga<sub>x</sub>, 0.10 ≤x≤ 0.35), are known for their excellent magnetostrictive and mechanical properties, which make them ideal candidates for the manufacturing of magnetostrictive microactuator devices. Although techniques have been reported for the machining of such materials at a bigger scale, adequate miniaturisation technologies are sought after to enable the integration of Galfenol into MEMS devices. For this purpose, electrodeposition is an appealing technique as it enables rapid and relatively inexpensive growth, while eliminating the need for selective etching processes. This paper presents advances towards the development of a reliable and reproducible process for the electrodeposition of micrometre-thick Galfenol films through systematic experimental characterisation. A preliminary application is finally presented in the form of bilayer cantilevers fabricated by depositing Galfenol on top of copper beams that can be deflected by applying a uniform external magnetic field.</p>