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Oxley, M.
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Publications (5/5 displayed)
- 2009Theory of dynamical scattering in near-edge electron energy loss spectroscopycitations
- 2008Depth sectioning using electron energy loss spectroscopycitations
- 2008Volcano structure in atomic resolution core-loss imagescitations
- 2007Interpreting atomic-resolution spectroscopic imagescitations
- 2007Depth sectioning in scanning transmission electron microscopy based on core-loss spectroscopycitations
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document
Depth sectioning using electron energy loss spectroscopy
Abstract
The continued development of electron probe aberration correctors for scanning transmission electron microscopy has enabled finer electron probes, allowing atomic resolution column-by-column electron energy loss spectroscopy. Finer electron probes have also led to a decrease in the probe depth of focus, facilitating optical slicing or depth sectioning of samples. The inclusion of post specimen aberration corrected image forming lenses allows for scanning confocal electron microscopy with further improved depth resolution and selectivity.