| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Strunskus, Thomas
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (33/33 displayed)
- 2024Early-stage silver growth during sputter deposition on SiO2 and polystyrene - Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMScitations
- 2024Early-stage silver growth during sputter deposition on SiO$_2$ and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMScitations
- 2024Influence of Silsesquioxane-Containing Ultra-Thin Polymer Films on Metal Oxide Gas Sensor Performance for the Tunable Detection of Biomarkerscitations
- 2024Co‐sputtering of A Thin Film Broadband Absorber Based on Self‐Organized Plasmonic Cu Nanoparticlescitations
- 2024Plasma‐Driven Tuning of Dielectric Permittivity in Graphenecitations
- 2023Two-in-One Sensor Based on PV4D4-Coated TiO 2 Films for Food Spoilage Detection and as a Breath Marker for Several Diseasescitations
- 2023Co‐sputtering of A Thin Film Broadband Absorber Based on Self‐Organized Plasmonic Cu Nanoparticles
- 2023Tuning the Selectivity of Metal Oxide Gas Sensors with Vapor Phase Deposited Ultrathin Polymer Thin Filmscitations
- 2022A thin-film broadband perfect absorber based on plasmonic copper nanoparticlescitations
- 2022In Situ Monitoring of Scale Effects on Phase Selection and Plasmonic Shifts during the Growth of AgCu Alloy Nanostructures for Anticounterfeiting Applicationscitations
- 2022Template-Induced Growth of Sputter-Deposited Gold Nanoparticles on Ordered Porous TiO$_2$ Thin Films for Surface-Enhanced Raman Scattering Sensorscitations
- 2022Sensing performance of CuO/Cu2O/ZnOcitations
- 2021Selective Silver Nanocluster Metallization on Conjugated Diblock Copolymer Templates for Sensing and Photovoltaic Applicationscitations
- 2021Tuning wettability of TiO 2 thin film by photocatalytic deposition of 3D flower- and hedgehog-like Au nano- and microstructurescitations
- 2021Revealing the growth of copper on polystyrene- block -poly(ethylene oxide) diblock copolymer thin films with in situ GISAXScitations
- 2021Tuning wettability of TiO2 thin film by photocatalytic deposition of 3D flower- and hedgehog-like Au nano- and microstructurescitations
- 2021Real-time insight into nanostructure evolution during the rapid formation of ultra-thin gold layers on polymerscitations
- 2020Following in Situ the Deposition of Gold Electrodes on Low Band Gap Polymer Filmscitations
- 2019Correlating Nanostructure, Optical and Electronic Properties of Nanogranular Silver Layers during Polymer-Template-Assisted Sputter Depositioncitations
- 2019PANI film on carbon nanowalls: synthesis and analysis
- 2019PANI film on carbon nanowalls: synthesis and analysis
- 2019The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin filmscitations
- 2019Pathways to Tailor Photocatalytic Performance of TiO2 Thin Films Deposited by Reactive Magnetron Sputteringcitations
- 2018A Flexible Oxygenated Carbographite Nanofilamentous Buckypaper as an Amphiphilic Membranecitations
- 2018Plasma based formation and deposition of metal and metal oxide nanoparticles using a gas aggregation sourcecitations
- 2017Role of Sputter Deposition Rate in Tailoring Nanogranular Gold Structures on Polymer Surfacescitations
- 2015Real-Time Monitoring of Morphology and Optical Properties during Sputter Deposition for Tailoring Metal–Polymer Interfacescitations
- 2014In situ Raman spectroscopy for growth monitoring of vertically aligned multiwallcarbon nanotubes in plasma reactorcitations
- 2013Electronic structure, adsorption geometry, and photoswitchability of azobenzene layers adsorbed on layered crystalscitations
- 2012Vapour phase deposition of highly crystalline self-poled piezoelectric nylon-11citations
- 2010Anomalous Surface Compositions of Stoichiometric Mixed Oxide Compoundscitations
- 2008Tuning of electrical and structural properties of metal-polymer nanocomposite films prepared by co-evaporation techniquecitations
- 2007Influence of molecular structure on phase transitions: A study of self-assembled monolayers of 2-(aryl)-ethane thiolscitations
Places of action
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article
The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films
Abstract
Morphology is a critical parameter for various thin film applications, influencing properties like wetting, catalytic performance and sensing efficiency. In this work, we report on the impact of oxygen partial flow on the morphology of ceramic thin films deposited by pulsed DC reactive magnetron sputtering. The influence of O2/Ar ratio was studied on three different model systems, namely Al2O3, CuO and TiO2. The availability of oxygen during reactive sputtering is a key parameter for a versatile tailoring of thin film morphology over a broad range of nanostructures. TiO2 thin films with high photocatalytic performance (up to 95% conversion in 7 h) were prepared, exhibiting a network of nanoscopic cracks between columnar anatase structures. In contrast, amorphous thin films without such crack networks and with high resiliency to crystallization even up to 950 °C were obtained for Al2O3. Finally, we report on CuO thin films with well aligned crystalline nanocolumns and outstanding gas sensing performance for volatile organic compounds as well as hydrogen gas, showing gas responses up to 35% and fast response in the range of a few seconds.