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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Mazur, Michal
Charles University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2023Exfoliating layered zeolite MFI into unilamellar nanosheets in solution as precursors for the synthesis of hierarchical nanocomposites and oriented filmscitations
- 2022Direct dehydrogenation of propane over Pd nanoparticles encapsulated within IPC zeolites with tunable pore sizes ; Přímá dewhydrogenace propanu na Pd nanočásticích zapouzdřených uvnitř IPC zeolitu s volitelnou velikostí pórůcitations
- 2021Controlled synthesis of large single crystals of metal-organic framework CPO-27-Ni prepared by a modulation approach : in situ single crystal X-ray diffraction studiescitations
- 2021Controlled synthesis of large single crystals of metal-organic framework CPO-27-Ni prepared by a modulation approach: in situ single crystal X-ray diffraction studiescitations
- 2020Effect of physical activation/surface functional groups on wettability and electrochemical performance of carbon/activated carbon aerogels based electrode materials for electrochemical capacitorscitations
- 2020Core–Shell Metal Zeolite Composite Catalysts for In Situ Processing of Fischer–Tropsch Hydrocarbons to Gasoline Type Fuelscitations
- 2019Effect of nitrogen doping on the electrochemical performance of resorcinol-formaldehyde based carbon aerogels as electrode material for supercapacitor applicationscitations
- 2019Vapour-phase-transport rearrangement technique for the synthesis of new zeolitescitations
- 2018Zeolite framework functionalisation by tuneable incorporation of various metals into the IPC-2 zeolitecitations
- 2017Modification of various properties of HfO2 thin films obtained by changing magnetron sputtering conditionscitations
- 2016Investigation of various properties of HfO2-TiO2 thin film composites deposited by multi-magnetron sputtering systemcitations
- 2015Investigation of structural, optical and micro-mechanical properties of (NdyTi1-y)O-x thin films deposited by magnetron sputteringcitations
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article
Investigation of various properties of HfO2-TiO2 thin film composites deposited by multi-magnetron sputtering system
Abstract
n this work the properties of hafnium dioxide (HfO<sub>2</sub>), titanium dioxide (TiO<sub>2</sub>) and mixed HfO<sub>2</sub>-TiO<sub>2</sub> thin films with various amount of titanium addition, deposited by magnetron sputtering were described. Structural, surface, optical and mechanical properties of deposited coatings were analyzed. Based on X-ray diffraction and Raman scattering measuremets it was observed that there was a significant influence of titanium concentration in mixed TiO<sub>2</sub>-HfO<sub>2</sub> thin films on their microstructure. Increase of Ti content in prepared mixed oxides coatings caused, e.g. a decrease of average crystallite size and amorphisation of the coatings. As-deposited hafnia and titania thin films exhibited nanocrystalline structure of monoclinic phase and mixed anatase-rutile phase for HfO<sub>2</sub> and TiO<sub>2</sub> thin films, respectively. Atomic force microscopy investigations showed that the surface of deposited thin films was densely packed, crack-free and composed of visible grains. Surface roughness and the value of water contact angle decreased with the increase of Ti content in mixed oxides. Results of optical studies showed that all deposited thin films were well transparent in a visible light range. The effect of the change of material composition on the cut-off wavelength, refractive index and packing density was also investigated. Performed measurements of mechanical properties revealed that hardness and Young’s elastic modulus of thin films were dependent on material composition. Hardness of thin films increased with an increase of Ti content in thin films, from 4.90GPa to 13.7GPa for HfO<sub>2</sub> and TiO<sub>2</sub>, respectively. The results of the scratch resistance showed that thin films with proper material composition can be used as protective coatings in optical devices.