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| Naji, M. |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Kočí, Jan | Prague |
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| Azam, Siraj |
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| Azevedo, Nuno Monteiro |
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Strehle, Steffen
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Publications (8/8 displayed)
- 2023Ultralow Expansion Glass as Material for Advanced Micromechanical Systemscitations
- 2023Ultrathin hematite-hercynite films for future unassisted solar water splitting
- 2023Wet chemical and plasma etching of photosensitive glasscitations
- 2022Thermal analysis of the ceramic material and evaluation of the bonding behavior of silicon-ceramic composite substratescitations
- 2022Localized Direct Material Removal and Deposition by Nanoscale Field Emission Scanning Probescitations
- 2021Highly anisotropic fluorine-based plasma etching of ultralow expansion glasscitations
- 2021Contamination‐assisted rather than metal catalyst‐free bottom‐up growth of silicon nanowirescitations
- 2020Revealing the local crystallinity of single silicon core-shell nanowires using tip-enhanced Raman spectroscopycitations
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article
Ultralow Expansion Glass as Material for Advanced Micromechanical Systems
Abstract
<jats:sec><jats:label /><jats:p>Ultralow expansion (ULE) glasses are of special interest for temperature stabilized systems for example in precision metrology. Nowadays, ULE materials are mainly used in macroscopic and less in micromechanical systems. Reasons for this are a lack of technologies for parallel fabricating high‐quality released microstructures with a high accuracy. As a result, there is a high demand in transferring these materials into miniaturized application examples, realistic system modeling, and the investigation of microscopic material properties. Herein, a technological base for fabricating released micromechanical structures and systems with a structure height above 100 μm in ULE 7972 glass is established. Herein, the main fabrication parameters that are important for the system design and contribute thus to the introduction of titanium silicate as material for glass‐based micromechanical systems are discussed. To study the mechanical properties in combination with respective simulation models, microcantilevers are used as basic mechanical elements to evaluate technological parameters and other impact factors. The implemented models allow to predict the micromechanical system properties with a deviation of only ±5% and can thus effectively support the micromechanical system design in an early stage of development.</jats:p></jats:sec>